Etch products dynamics of polyphenylene oxide laminates using a CF₄/O₂/Ar downstream microwave plasma

An edition of Etch products dynamics of polyphenylene oxide laminates using a CF₄/O₂/Ar downstream microwave plasma (1999)

Etch products dynamics of polyphenylene oxide laminates using a CF₄/O₂/Ar downstream microwave plasma

By Chia-Chang Hsu

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Publish Date

1999

Publisher

Language

eng

Pages

214

Description:

subjects: Plasma etching, Microwave plasmas