Angle of incidence dependence of light ion physical sputtering of carbon

An edition of Angle of incidence dependence of light ion physical sputtering of carbon (1989)

Angle of incidence dependence of light ion physical sputtering of carbon

By A. A. Haasz

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Publish Date

1989

Publisher

Sine nomine

Language

Pages

919

Description:

subjects: Carbon, Sputtering, Incidence