Energy dependence of the yields of ion-induced sputtering of monatomic solids

An edition of Energy dependence of the yields of ion-induced sputtering of monatomic solids (1983)

Energy dependence of the yields of ion-induced sputtering of monatomic solids

By Noriaki Matsunami

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Publish Date

1983

Publisher

Institute of Plasma Physics, Nagoya University

Language

eng

Pages

284

Description:

subjects: Sputtering