

An edition of Radio frequency power in plasmas (1997)
12th Topical Conference (AIP Conference Proceedings)
By Topical Conference on Radio Frequency Power in Plasmas (12th 1997 Savannah, Georgia)
Publish Date
April 15, 1998
Publisher
American Institute of Physics
Language
eng
Pages
504
1-2 of 2 Editions
Language: eng
Pages: 512
Published In: April 15, 1998
Publisher: American Institute of Physics
Language: eng
Pages: 496
Published In: 1997
Publisher: AIP Press