An edition of Submicrometer metallization (1993)
the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California
By Krishna Shenai
Publish Date
1993
Publisher
SPIE
Language
eng
Pages
344
Description:
subjects: Congresses, Metallic films, Semiconductor-metal boundaries, Metallizing, Electrodiffusion, Integrated circuits, Design and construction