Cover of Handbook of Silicon Based MEMS Materials and Technologies

An edition of Handbook of Silicon Based MEMS Materials and Technologies (2009)

Handbook of Silicon Based MEMS Materials and Technologies

By Markku Tilli,Mervi Paulasto-Krockel,Teruaki Motooka,Matthias Petzold,Horst Theuss

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Publish Date

2020

Publisher

Elsevier

Language

eng

Pages

826

Description:

subjects: Microelectromechanical systems, Silicon, Electronic apparatus and appliances, design and construction, Materials, Electric properties, Micro-Electrical-Mechanical Systems, Microsystèmes électromécaniques, Matériaux, TECHNOLOGY & ENGINEERING, Mechanical