An edition of Handbook of Silicon Based MEMS Materials and Technologies (2009)
Handbook of Silicon Based MEMS Materials and Technologies
By Markku Tilli,Mervi Paulasto-Krockel,Teruaki Motooka,Matthias Petzold,Horst Theuss
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Publish Date
2015
Publisher
Elsevier Science & Technology Books
Language
eng
Pages
826