An edition of IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems (1998)

IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems

proceedings : an investigation of micro structures, sensors, actuators, machines and systems, January 25-29, 1998, Heidelberg, Germany

By IEEE Workshop on Micro Electro Mechanical Systems (11th 1998 Heidelberg, Germany),Germany) IEEE Workshop on Micro Electro Mechanical Systems (11th : 1998 : Heidelberg,Institute of Electrical and Electronics Engineers