Sputtering threshold energies of heavy ions

By Maris A. Mantenieks

0 (0 Ratings)

0 Want to read0 Currently reading0 Have read

Publish Date

1999

Publisher

National Aeronautics and Space Administration, Glenn Research Center,National Technical Information Service, distributor

Language

eng

Pages

Description:

subjects: Electric potential, Heavy ions, Molybdenum, Sputtering, Threshold voltage, Xenon