An edition of Piezoelectric Multilayer Beam-Bending Actuators (Microtechnology and MEMS) (2007)
By R.G. Ballas
Publish Date
March 12, 2007
Publisher
Springer
Language
eng
Pages
382
Description:
subjects: Actuators, Piezoelectric devices, Piezoelectric ceramics, Piezoelectricity, Detectors