CW laser annealing of ion implanted single crystal silicon

An edition of CW laser annealing of ion implanted single crystal silicon (1979)

CW laser annealing of ion implanted single crystal silicon

By Arnon Gat

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Publish Date

1979

Publisher

Coherent Center for Laser Annealing

Language

eng

Pages

119

Description:

subjects: Silicon crystals, Annealing of crystals, Ion implantation