Investigation of atomic oxygen erosion of polyimide Kapton H exposed to a plasma asher environment

An edition of Investigation of atomic oxygen erosion of polyimide Kapton H exposed to a plasma asher environment (1999)

Investigation of atomic oxygen erosion of polyimide Kapton H exposed to a plasma asher environment

By Aaron Snyder

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Publish Date

1999

Publisher

National Aeronautics and Space Administration, Glenn Research Center,National Technical Information Service, distributor

Language

eng

Pages

Description:

subjects: Oxygen atoms, Kapton (Trademark), Technology utilization, Data acquisition, Research, Polyimides, Erosion, Experimentation