Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon

An edition of Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon (1997)

Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon

By James D. Patterson

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Publish Date

1997

Publisher

National Aeronautics and Space Administration, Langley Research Center

Language

eng

Pages

Description:

subjects: Silicon, Microelectromechanical systems, Fabry-Perot interferometers, Mechanical properties, Optical properties