Synthesis of silane and silicon in a non-equalibrium plasma jet ..

An edition of Synthesis of silane and silicon in a non-equalibrium plasma jet .. (1978)

Synthesis of silane and silicon in a non-equalibrium plasma jet ...

By AeroChem Research Laboratories

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Publish Date

1978

Publisher

Dept. of Energy,for sale by the National Technical Information Service

Language

eng

Pages

Description:

subjects: Silane, Plasma jets, Silicon