Semi-annual progress report on a study of reactive plasma deposited thin films

An edition of Semi-annual progress report on a study of reactive plasma deposited thin films (1986)

Semi-annual progress report on a study of reactive plasma deposited thin films

By Jason Gilchrist

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Publish Date

1986

Publisher

North Carolina Agricultural and Technical State University, Dept. of Physics,National Aeronautics and Space Administration,National Technical Information Service, distributor

Language

eng

Pages

Description:

subjects: Vapor deposition, Nitrides, Semiconductor devices, Thin films