System for the growth of bulk SiC crystals by modified CVD techniques

An edition of System for the growth of bulk SiC crystals by modified CVD techniques (1994)

System for the growth of bulk SiC crystals by modified CVD techniques

final report

By Andrew J. Steckl

0 (0 Ratings)

0 Want to read0 Currently reading0 Have read

Publish Date

1994

Publisher

National Aeronautics and Space Administration,National Technical Information Service, distributor

Language

eng

Pages

Description:

subjects: Single crystals, Crystal structure, Silicon carbides, Film thickness, Thin films, Crystal growth, Vapor deposition, Silicon films, Substrates