Paralinear oxidation of CVD SiC in Water Vapor

An edition of Paralinear oxidation of CVD SiC in Water Vapor (1997)

Paralinear oxidation of CVD SiC in Water Vapor

By Elizabeth J. Opila

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Publish Date

1997

Publisher

National Aeronautics and Space Administration

Language

eng

Pages

109

Description:

subjects: Silicon carbide, Oxidizing agents