Removal of oxygen from electronic materials by vapor-phase processes

An edition of Removal of oxygen from electronic materials by vapor-phase processes (1997)

Removal of oxygen from electronic materials by vapor-phase processes

By Witold Palosz

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Publish Date

1997

Publisher

National Aeronautics and Space Administration,National Technical Information Service, distributor

Language

eng

Pages

Description:

subjects: Partial pressure, Oxides, Thermochemistry, Vapor phases, Purification