Enhancement of thickness uniformity of thin films grown by pulsed laser deposition

An edition of Enhancement of thickness uniformity of thin films grown by pulsed laser deposition (1995)

Enhancement of thickness uniformity of thin films grown by pulsed laser deposition

By Félix E. Fernández

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Publish Date

1995

Publisher

National Aeronautics and Space Administration,National Technical Information Service, distributor

Language

eng

Pages

Description:

subjects: Crystal growth, Film thickness, Augmentation, Radiation distribution, Plumes, Conics, Pulsed laser deposition