Experimental performance of a micromachined heat flux sensor

An edition of Experimental performance of a micromachined heat flux sensor (1998)

Experimental performance of a micromachined heat flux sensor

By S. Stefanescu

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Publish Date

1998

Publisher

National Aeronautics and Space Administration, Lewis Research Center,National Technical Information Service, distributor

Language

eng

Pages

Description:

subjects: Fabrication, Micromachining, Miniaturization, Polyimides, Thin films