Evaluation of a procedure for the measurement of thin film thickness by X-ray reflectivity

An edition of Evaluation of a procedure for the measurement of thin film thickness by X-ray reflectivity (1997)

Evaluation of a procedure for the measurement of thin film thickness by X-ray reflectivity

By Jeannette Benavides

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Publish Date

1997

Publisher

National Aeronautics and Space Administration, Goddard Space Flight Center,National Technical Information Service, distributor

Language

eng

Pages

Description:

subjects: Reflectance, Solid state devices, X ray diffraction, Film thickness, Thin films, Silicon dioxide, Measuring instruments, X rays