Influence of the deposition conditions on radiofrequency magnetron sputtered MoS2 films

An edition of Influence of the deposition conditions on radiofrequency magnetron sputtered MoS2 films (1990)

Influence of the deposition conditions on radiofrequency magnetron sputtered MoS2 films

By Pierre A. Steinmann

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Publish Date

1990

Publisher

National Aeronautics and Space Administration, Office of Management, Scientific and Technical Information Division,For sale by the National Technical Information Service

Language

eng

Pages

Description:

subjects: Radio frequencies, Lubrication and lubricants, Lubricants, Thin films, Magnetron sputtering, Deposition, Molybdenum compounds, Morphology, Coatings, Stoichiometry, Sputtering (Physics)