Gettering and defect engineerig in semiconductor technology XII
An edition of Gettering and defect engineerig in semiconductor technology XII (2008)
Gadest 2007 : proceedings of the 12th International Autumn Meeting, EMFCSC, Erice, Italy, October 14-19, 2007
By International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" (12th 2007 Erice, Italy)
Publish Date
2008
Publisher
Trans Tech Publications
Language
eng
Pages
642
Description: