Cover of CMOS cantilever sensor systems

An edition of CMOS cantilever sensor systems (2002)

CMOS cantilever sensor systems

atomic force microscopy and gas sensing applications

By D. Lange

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Publish Date

2002

Publisher

Springer

Language

eng

Pages

146

Description:

subjects: Atomic force microscopy, Complementary Metal oxide semiconductors, Design and construction, Equipment and supplies, Gas detectors, Levers, Metal oxide semiconductors, Complementary, Microelectromechanical systems, Metal oxide semiconductors, Electromechanical devices