An edition of Ion Implantation and Ion Beam Processing of Materials (1984)
Ion implantation and ion beam processing of materials
symposium held November 1983 in Boston, Massachusetts, U.S.A.
By Ion Implantationand Ion Beam Processing of Materials (Conference) (1983 Boston, Mass.)
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Publish Date
1984
Publisher
North-Holland,Elsevier Science Ltd
Language
eng
Pages
786
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