Atomic layer deposition applications 3

An edition of Atomic layer deposition applications 3 (2007)

Atomic layer deposition applications 3

By Symposium on Atomic Layer Deposition Applications (3rd 2007 Washington, D.C.)

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Publish Date

2007

Publisher

Electrochemical Society

Language

eng

Pages

288

Description:

subjects: Vapor-plating, Chemical vapor deposition, Congresses, Atomic layer deposition