An edition of Periodic materials and interference lithography (2009)
for photonics, phononics and mechanics
By Martin Maldovan
Publish Date
2009
Publisher
Wiley-VCH
Language
eng
Pages
313
Description:
subjects: Materials science, Materials, Photolithography, Nanostructured materials, Photonics, Crystallography, Lithography, Interferenzlithographie, Photonischer Kristall