MEMS/MOEMS components and their applications V

An edition of MEMS/MOEMS components and their applications V (2008)

MEMS/MOEMS components and their applications V

special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA

By Srinivas A. Tadigadapa

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Publish Date

2008

Publisher

SPIE

Language

eng

Pages

-

Description:

subjects: Transducteurs, Microelectromechanical systems, Transducers, Microsystèmes électromécaniques, Congrès, Congresses, Dispositifs optoélectroniques, Optoelectronic devices