An edition of Lithography (2010)
Lithography
main techniques
By Stefan Landis
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Publish Date
2011
Publisher
ISTE,Wiley
Language
eng
Pages
320
Description:
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--