Silicon technologies
An edition of Silicon technologies (2011)
Ion Implantation and Thermal Treatment
By Annie Baudrant
Publish Date
2013
Publisher
Wiley & Sons, Incorporated, John
Language
eng
Pages
368
Description:
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.