Cover of Introduction to microfabrication

An edition of Introduction to microfabrication (2005)

Introduction to microfabrication

By Sami Franssila

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Publish Date

2010

Publisher

John Wiley & Sons,Wiley

Language

eng

Pages

536

Description:

subjects: Microelectromechanical systems, Microfabrication, Electronic apparatus and appliances, Electromechanical devices, TECHNOLOGY & ENGINEERING, Electronics, Microelectronics, Digital