An edition of Nanolithography (1994)

Nanolithography: A Borderland between STM, EB, IB, and X-Ray Lithographies (NATO Science Series E:)

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Publish Date

April 30, 1994

Publisher

Springer

Language

eng

Pages

228

Description:

subjects: Nanolithography, Molecular electronics, Congresses, Microlithography, Integrated circuits, Design and construction