Cover of Modeling MEMS and NEMS

An edition of Modeling MEMS and NEMS (2003)

Modeling MEMS and NEMS

By John A. Pelesko

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Publish Date

2003

Publisher

Chapman & Hall/CRC

Language

eng

Pages

-

Description:

subjects: Microelectromechanical systems, Mathematical models, Electromechanical devices, TECHNOLOGY & ENGINEERING, Electrical, Mikroelektromekaniska system, Nanoteknik