An edition of The MEMS handbook (2001)
MEMS
introduction and fundamentals
By Mohamed Gad-el-Hak
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Publish Date
2006
Publisher
CRC/Taylor & Francis
Language
eng
Pages
1720
Description:
subjects: Microelectromechanical systems, Handbooks, manuals, Microeletrônica - manuais, Nanotechnology, Microelectronics, Microsystèmes électromécaniques, Microélectronique, Mechanical engineering, Génie mécanique, Guides, manuels, TECHNOLOGY / Electronics / Microelectronics, TECHNOLOGY / Engineering / Civil