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Cover of Sputtering by particle bombardment

Sputtering by particle bombardment

experiments and computer calculations from threshold to MeV energies

By Rainer Behrisch,Wolfgang Eckstein

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Publish Date

2007

Publisher

Springer

Language

eng

Pages

507

Description:

subjects: Sputtering (Physics),  Chemistry,  Plasma (Ionized gases),  Surfaces (Physics),  Thin Films Surfaces and Interfaces,  Plasma Physics Atoms and Molecules in Strong Fields,  Ions,  Spectrometry, Mass, Fast Atom Bombardment