An edition of Microlithography (2007)
Microlithography
Science and Technology, Second Edition (Opitcal Science and Engineering)
By Kazuaki Suzuki,Bruce W. Smith
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Publish Date
May 11, 2007
Publisher
CRC
Language
eng
Pages
864
Description:
subjects: Complementary Metal oxide semiconductors, Integrated circuits, Manufacturing processes, Microlithography, Industrial applications, Masks, Design and construction, Corrosion and anti-corrosives, Protective coatings, Microlithographie, Applications industrielles, Circuits intégrés, Masques, MOS complémentaires, Conception et construction, Fabrication, Manufacturing, TECHNOLOGY & ENGINEERING, Electronics, Circuits, General, Lithografie, Lithographie (Halbleitertechnologie)