An edition of Sputtering Materials For Vlsi And Thin Film Devices (2012)
Sputtering Materials for VLSI and Thin Film Devices
By Jaydeep Sarkar
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Publish Date
2017
Publisher
Elsevier Science & Technology Books,William Andrew
Language
eng
Pages
608
Description:
subjects: Sputtering (physics), Integrated circuits, very large scale integration, Thin films, Electronic apparatus and appliances, design and construction, Microelectronics, Materials, Cathode sputtering (Plating process), Integrated circuits, Very large scale integration, Thin film devices, Flat panel displays