

An edition of Sputtering Materials For Vlsi And Thin Film Devices (2012)
By Jaydeep Sarkar
Publish Date
2012
Publisher
William Andrew Publishing
Language
-
Pages
608
Description:
subjects: Sputtering (physics), Integrated circuits, very large scale integration, Thin films, Electronic apparatus and appliances, design and construction, Microelectronics, Materials, Cathode sputtering (Plating process), Integrated circuits, Very large scale integration, Thin film devices, Flat panel displays