An edition of Micro mechanical systems (1998)
Micro mechanical systems
principles and technology
By T. Fukuda,W. Menz
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Publish Date
1998
Publisher
Elsevier
Language
eng
Pages
268
Description:
subjects: Microelectromechanical systems -- Handbooks, manuals, etc, Microelectromechanical systems, Handbooks, manuals, Electromechanical devices, Microelectronics, Microsystèmes électromécaniques, Guides, manuels, TECHNOLOGY & ENGINEERING, Mechanical, Mikromechanik, Mikrosystemtechnik, Tecnologia, Engenharia eletrônica, Microactionneurs, Microtechniques, Micromécanique (ingénierie)