An edition of Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography (1993)

Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography

19-22 July 1992, San Diego, California

By Richard B. Hoover

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Publish Date

1993

Publisher

SPIE

Language

eng

Pages

702

Description:

subjects: X-ray astronomy, Congresses, Mirrors, X-ray lithography, Ultraviolet astronomy, Grazing incidence, Design and construction, Extreme ultraviolet lithography, X-ray optics