An edition of Microsystems engineering (2003)
metrology and inspection III : 23-25 June, 2003, Munich, Germany
By Christophe Gorecki
Publish Date
2003
Publisher
SPIE
Language
eng
Pages
210
Description:
subjects: Microelectromechanical systems, Mensuration, Industrial applications, Microelectronics, Optical methods, Quality control, Congresses, Optical detectors, Interferometry, Measurement, Electromechanical devices