An edition of Fabrication of silicon microprobes for optical near-field applications (2002)

Fabrication of Silicon Microprobes for Optical Near-Field Applications

By Phan Ngoc Minh,Ono Takahito,Esashi Masayoshi

0 (0 Ratings)

0 Want to read0 Currently reading0 Have read

Publish Date

January 15, 2002

Publisher

CRC,CRC Press

Language

eng

Pages

192

Description:

subjects: Micromachining, Silicon, Near-field microscopy, Microprobe analysis, Micro-usinage, Analyse par microsonde, Microscopie en champ proche, Silicium, TECHNOLOGY & ENGINEERING, Optics