Cover of Handbook of thin-film deposition processes and techniques

An edition of Handbook of thin-film deposition processes and techniques (2002)

Handbook of thin-film deposition processes and techniques

principles, methods, equipment and applications

By Krishna Seshan

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Publish Date

2002

Publisher

Noyes Publications/William Andrew Pub.

Language

eng

Pages

629

Description:

subjects: Thin film devices, Chemical vapor deposition, Handbooks, manuals, Thin films, Design and construction, Couches minces, Guides, manuels, Dépôt chimique en phase vapeur, TECHNOLOGY & ENGINEERING, Electronics, Solid State, Semiconductors, Filmes finos (equipamentos)