Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry

An edition of Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry (1996)

Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry

By A. R. Heyd

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Publish Date

1996

Publisher

National Aeronautics and Space Administration,National Technical Information Service, distributor

Language

eng

Pages

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