An edition of Fundamental electron interactions with plasma processing gases (2003)
Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules)
By L. G. Christophorou,James K. Olthoff
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Publish Date
December 31, 2003
Publisher
Springer
Language
eng
Pages
776
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View Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules)Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules)
Language: eng
Pages: 776
Published In: December 31, 2003
Publisher: Springer