Cover of Mechanical microsensors

An edition of Mechanical microsensors (2000)

Mechanical Microsensors (Microtechnology and MEMS)

By M. Elwenspoek,R. Wiegerink

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Publish Date

January 12, 2001

Publisher

Springer

Language

eng

Pages

301

Description:

subjects: Silicon, Microelectromechanical systems, Transducers, Micromachining, Detectors, Design and construction, Microelectronics, Micromechanics, Machining, Detectors--design and construction, Microelectromechanical systems--design and construction, Tk7875 .e49 2001, 681/.2