An edition of Science and technology of microfabrication (1987)

Science and technology of microfabrication

symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.

By R. E. Howard

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Publish Date

1987

Publisher

Materials Research Society

Language

eng

Pages

384

Description:

subjects: Very large scale integration, Microfabrication, Congresses, Integrated circuits, Design and construction, Materials, research, Integrated circuits, very large scale integration, Manufacturing processes