An edition of Lithographic and micromachining techniques for optical component fabrication II (2003)

Lithographic and micromachining techniques for optical component fabrication II

3-4 August, 2003, San Diego, California, USA

By Hans Peter Herzig

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Publish Date

2003

Publisher

SPIE

Language

eng

Pages

208

Description:

subjects: Congresses, Micromachining, Microlithography, Optical instruments, Lenses, Design and construction