Laser and particle-beam chemical processing for microelectronics

An edition of Laser and particle-beam chemical processing for microelectronics (1988)

Laser and particle-beam chemical processing for microelectronics

symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.

By Daniel J. Ehrlich,Gregg S. Higashi

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Publish Date

1988

Publisher

Materials Research Society

Language

eng

Pages

522

Description:

subjects: Congresses, Lasers, Lasers in chemistry, Industrial applications, Integrated circuits, Design and construction, Microelectronics, Particle beams, Lasers, industrial applications, Electronic circuit design