An edition of Tungsten and other refractory metals for VLSI applications (1986)

Tungsten and other refractory metals for VLSI applications

proceedings of the 1985 workshop held October 7, 1985, Albuquerque, New Mexico, U.S.A. and the 1984 workshop held November 12-13, 1984, Albuquerque, New Mexico, U.S.A.

By Robert S. Blewer